Preparation of Nano Tungsten Trioxide Gas Sensing Film by Gas Phase Method
Nano tungsten trioxide is a typical N-type semiconductor gas sensing material, it has a large surface area, stable chemical properties, a wide band gap, a variety of toxic gases have good sensitivity, can effectively improve gas sensor sensitivity and response speed, is a good gas-sensitive film material. The preparation and synthesis of nano tungsten trioxide thin film by gas phase method is mainly to convert the synthesized tungsten trioxide crystal into the state of gas phase of tungsten trioxide through steps of sublimation, evaporation and decomposition. By setting the experimental conditions, the tungsten trioxide is transformed into tungsten trioxide saturated vapor. Finally, as the temperature decreases, saturated steam will crystallize in cold to grow as nanostructured tungsten trioxide crystals. The preparation of nano tungsten trioxide gas-sensitive film gas method includes two kinds of chemical and physical methods. Chemical vapor deposition (CVD) principle is the use of g