Tungsten Doped Vanadium Dioxide
Tungsten doping is a promising and effective way to reduce the phase transition temperature of vanadium didioxide. Doping can improve the electrical properties of vanadium dididioxide thin films, reduce the square resistance of the films, and improve the resistance temperature coefficient of the films. Common methods of doping include evaporation, ion implantation, sol-gel and magnetron sputtering. Researchers have developed a method for preparing tungsten doped vanadium dioxide thin films, including the following steps: (1) The substrate is cleaned, and the cleaned substrate is put into the high real chamber. (2) Preparation of VO x /W/VO x composite film: The argon, metal vanadium target and tungsten metal target are placed in the vacuum chamber, and the metal vanadium target and tungsten target surface are pre sputtered by the sputtering power source of vanadium target and the tungsten target sputtering power, respectively. When the vanadium target is sputter target, the tungs...