Reactive Magnetron Sputtering Method Preparing Nanometer Tungsten Sulfide Membrane
Tungsten sulfide is an excellent solid lubricant material, it has high application value in the field of super solid lubrication, especially its role in the aerospace industry. Tungsten sulfide membrane have layered structure, it has lower hardness and better stability under high temperature, it is suitable to be used as a solid lubricant for friction parts in special environment. There are three main methods for preparing tungsten disulfide membrane which include RF sputtering method, reactive magnetron sputtering method, chemical deposition method. Reactive magnetron sputtering method is used to bombard pure tungsten targets with high energy noble gas and hydrogen sulfide mixed gas ions, the sputtered atoms react with the sulfur ions released from hydrogen sulfide gas to form a thin membrane on the substrate, reactive magnetron sputtering is also one of the most commonly used methods to obtain WS2 thin membranes. Preparation of WS 2 thin membranes on quartz substrates by reacti...