Structure and Optical Property of Tungsten Oxide Thin Films
The films annealed at 200C and 300 C display violet–red under the sunlight as well as the as-deposited ones. Nevertheless, the film annealed at 400C exhibits transparency and appeared to be blue colored. The film annealed at 200C is amorphous, i.e. does not exhibit diffraction peaks while those annealed at 400C exhibit several sharp diffraction peaks, indicating the crystallization of this film happened. The peaks shown in Figs. 1(b) and 1(c) can be attributed to a mixture of polycrystalline phases, which includes hexagonal h-WO3 phase (JCPDS PDF-33-1387) and triclinic t-WO3 phase (JCPDS PDF-30-1387). It is also seen that the films annealed at 400C were dominated by hexagonal h-WO3 phases. Acosta et al. had prepared the tungsten oxide thin films by sputtering WO3 bulk. Their results indicated that the films mainly contained hexagonal h-WO3 phase and monoclinic α-WO3 phase. Usually, the polycrystalline monoclinic and triclinic phases can be observed in the films deposited by reactive m...