博文

目前显示的是标签为“NO2 sensor”的博文

Carbon Doped Tungsten Oxide Nanorods NO2 Sensor Prepared by Glancing Angle RF Sputtering

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Nanostructures such as nanowires, nanorods, nanotubes of metal oxide semiconductor (MO S ) materials have recently attracted monumental interest in gas-sensing applications because of their excellent performances owing to their large surface to vol-ume ratio, lower electron recombination rate and high stability. Among various MO S  materials, tungsten trioxide (WO 3 ) is a highly promising candidate due to its fast response with high sensitivity toward NO x . Glancing angle depositio (GLAD) technique is a relatively new method for fabrication of well-ordered and sophisticated nanostructures i.e. nanorods, nanoblade and zigzag nanocolumns. It is a modified physical vapor deposition process, in which substrate surface is rotated and tilted to an angle greater than 80° with respect to the normal of substrate surface or less than 10°with respect to the direction of vapor flux. The vapor molecules directed to the substrate will experience shadowing and limited surface diffusion c...

Carbon Doped Tungsten Oxide Nanorods NO2 Sensor Prepared by Glancing Angle RF Sputtering

图片
Nanostructures such as nanowires, nanorods, nanotubes of metal oxide semiconductor (MO S ) materials have recently attracted monumental interest in gas-sensing applications because of their excellent performances owing to their large surface to vol-ume ratio, lower electron recombination rate and high stability. Among various MO S  materials, tungsten oxide (WO 3 ) is a highly promising candidate due to its fast response with high sensitivity toward NO x . Glancing angle depositio (GLAD) technique is a relatively new method for fabrication of well-ordered and sophisticated nanostructures i.e. nanorods, nanoblade and zigzag nanocolumns. It is a modified physical vapor deposition process, in which substrate surface is rotated and tilted to an angle greater than 80° with respect to the normal of substrate surface or less than 10°with respect to the direction of vapor flux. The vapor molecules directed to the substrate will experience shadowing and limited surface diffusion condi...