Carbon Doped Tungsten Oxide Nanorods NO2 Sensor Prepared by Glancing Angle RF Sputtering
Nanostructures such as nanowires, nanorods, nanotubes of metal oxide semiconductor (MO S ) materials have recently attracted monumental interest in gas-sensing applications because of their excellent performances owing to their large surface to vol-ume ratio, lower electron recombination rate and high stability. Among various MO S materials, tungsten trioxide (WO 3 ) is a highly promising candidate due to its fast response with high sensitivity toward NO x . Glancing angle depositio (GLAD) technique is a relatively new method for fabrication of well-ordered and sophisticated nanostructures i.e. nanorods, nanoblade and zigzag nanocolumns. It is a modified physical vapor deposition process, in which substrate surface is rotated and tilted to an angle greater than 80° with respect to the normal of substrate surface or less than 10°with respect to the direction of vapor flux. The vapor molecules directed to the substrate will experience shadowing and limited surface diffusion c...