High Purity Tungsten Reduction Technology
High purity tungsten, which means more than 99.995% of the purity of tungsten, is a key material for the formation of the diffusion barrier in the process of mass integrated circuit and PVD coating. High purity tungsten powder has become an indispensable raw material for the microelectronics industry. Some scholars have put forward the preparation method of high purity tungsten powder for scale integrated circuit, which aims to make the production of high purity tungsten powder with purity not less than 99.999%, and to ensure the controllability of the particle size and morphology of tungsten powder. The process is as follows: (1) Using the industrial 0 grade ammonium parotungstate in GB/T10116-2007 as raw material, the three band rotary tube air furnace is calcined to form yellow tungsten. The temperature of the three zone is 550 + 5°C, 600 + 5°C, 600 + 5°C. The concentration of yellow tungsten is dissolved in 10% ammonia water at 50-60°C, the initial concentration of solution is...