Structure and Optical Property of Tungsten Oxide Film in Different Conditions

As we all know, annealing, or thermal, treatment is one of the most effective ways to influence the structure and the properties of tungsten oxide films. To investigate the effects of the annealing temperatures on the structure and optical property of tungsten oxide thin film that were deposited by magnetron sputtering of WO3 bulk in a vacuum, the deposited films were annealed at 200℃ and 300℃ for 60 min and at 400℃ for 60 min and 180 min in air, respectively. 

tungsten oxide thin film 

We find that the annealing temperature of 400℃ can effectively influence the structure and optical property of the deposited films. The films annealed at 200℃ and 300℃ display violetred under the sunlight as well as the as-deposited ones. Nevertheless, the film annealed at 400℃ exhibits transparency and appeared to be blue colored.

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